ATP » Staff » Fabian Schneider

Fabian Schneider, M.Sc.

Scientific coworker


Address:

Ruhr-Universität Bochum
Lehrstuhl für Automatisierungstechnik und Prozessinformatik
Fakultät für Elektrotechnik und Informationstechnik
Postfach ID 14
Universitätsstrasse 150
D-44780 Bochum


Room:

Building ID, Level 2, Room 529

Phone:

++49/234 32-24091

Fax:

++49/234 32-14101

E-Mail:

E-Mail: lastname@atp.rub.de




Research:

Monitoring methods for plasma-based surface treatment


Lecture assistence:

Winter term:

Sommer term:

Publications:

2023


  • F. Schneider, C. Wölfel:
    Robust interval observer for substrate state estimation of nonlinear reactive sputter processes
    Proc. of the 2023 IEEE Conference on Control Technology and Applications (CCTA), Bridgetown, Barbados, 2023.
  • F. Schneider, C. Wölfel:
    Observability analysis and substrate state estimation of nonlinear reactive sputter processes
    Proc. of the 24th IEEE International Conference on Process Control (PC), Strbske Pleso, Slovakia, 2023.
    DOI: https://doi.org/10.1109/PC58330.2023.10217785

Prices: